▌ Dr. Ramanathan S
Professor
MSB239
srinivar@iitm.ac.in
+91 44 22574171
Personal WebsiteResearch Areas
Electrochemistry, chemical mechanical planarization for semiconductor processing
Professor
MSB239
srinivar@iitm.ac.in
+91 44 22574171
Personal WebsiteResearch Areas
Electrochemistry, chemical mechanical planarization for semiconductor processing
2010 |
Manivannan, R; Victoria, S N; Ramanathan, S: Mechanism of high selectivity in ceria based shallow trench isolation chemical mechanical polishing slurries. Thin Solid Films, 518 (20), pp. 5737-5740, 2010, ISSN: 00406090. (Type: Journal Article | Links | BibTeX) @article{Manivannan20105737, title = {Mechanism of high selectivity in ceria based shallow trench isolation chemical mechanical polishing slurries}, author = {R Manivannan and S N Victoria and S Ramanathan}, url = {https://www.scopus.com/inward/record.uri?eid=2-s2.0-77955429784&doi=10.1016%2fj.tsf.2010.05.072&partnerID=40&md5=7b734d6deb414b076ce647e21ccd3f80}, doi = {10.1016/j.tsf.2010.05.072}, issn = {00406090}, year = {2010}, date = {2010-01-01}, journal = {Thin Solid Films}, volume = {518}, number = {20}, pages = {5737-5740}, keywords = {}, pubstate = {published}, tppubtype = {article} } |
Venkatesh, R P; Ramanathan, S: Electrochemical characterization of Cu dissolution and chemical mechanical polishing in ammonium hydroxide-hydrogen peroxide based slurries. Journal of Applied Electrochemistry, 40 (4), pp. 767-776, 2010, ISSN: 0021891X. (Type: Journal Article | Links | BibTeX) @article{Venkatesh2010767, title = {Electrochemical characterization of Cu dissolution and chemical mechanical polishing in ammonium hydroxide-hydrogen peroxide based slurries}, author = {R P Venkatesh and S Ramanathan}, url = {https://www.scopus.com/inward/record.uri?eid=2-s2.0-77952424188&doi=10.1007%2fs10800-009-0055-4&partnerID=40&md5=3fc6edbb8e074932c05bf6a2a4af4e3e}, doi = {10.1007/s10800-009-0055-4}, issn = {0021891X}, year = {2010}, date = {2010-01-01}, journal = {Journal of Applied Electrochemistry}, volume = {40}, number = {4}, pages = {767-776}, keywords = {}, pubstate = {published}, tppubtype = {article} } |
Maddala, J; Sambath, K; Kumar, V; Ramanathan, S: Identification of reaction mechanism for anodic dissolution of metals using Electrochemical Impedance Spectroscopy. Journal of Electroanalytical Chemistry, 638 (2), pp. 183-188, 2010, ISSN: 15726657. (Type: Journal Article | Links | BibTeX) @article{Maddala2010183, title = {Identification of reaction mechanism for anodic dissolution of metals using Electrochemical Impedance Spectroscopy}, author = {J Maddala and K Sambath and V Kumar and S Ramanathan}, url = {https://www.scopus.com/inward/record.uri?eid=2-s2.0-73049098976&doi=10.1016%2fj.jelechem.2009.11.021&partnerID=40&md5=42f0bfb62c7ab34e3a5032ec1e33489a}, doi = {10.1016/j.jelechem.2009.11.021}, issn = {15726657}, year = {2010}, date = {2010-01-01}, journal = {Journal of Electroanalytical Chemistry}, volume = {638}, number = {2}, pages = {183-188}, publisher = {Elsevier}, keywords = {}, pubstate = {published}, tppubtype = {article} } |
2009 |
Prasad, Y Nagendra; Kumar, V Vinod; Ramanathan, S: Electrochemical impedance spectroscopic studies of copper dissolution in arginine-hydrogen peroxide solutions. Journal of Solid State Electrochemistry, 13 (9), pp. 1351-1359, 2009, ISSN: 14328488. (Type: Journal Article | Links | BibTeX) @article{NagendraPrasad20091351, title = {Electrochemical impedance spectroscopic studies of copper dissolution in arginine-hydrogen peroxide solutions}, author = {Y Nagendra Prasad and V Vinod Kumar and S Ramanathan}, url = {https://www.scopus.com/inward/record.uri?eid=2-s2.0-67649882779&doi=10.1007%2fs10008-008-0682-4&partnerID=40&md5=af39b510122b20203da82c50514bf5e2}, doi = {10.1007/s10008-008-0682-4}, issn = {14328488}, year = {2009}, date = {2009-01-01}, journal = {Journal of Solid State Electrochemistry}, volume = {13}, number = {9}, pages = {1351-1359}, keywords = {}, pubstate = {published}, tppubtype = {article} } |
Manivannan, R; Ramanathan, S: The effect of hydrogen peroxide on polishing removal rate in CMP with various abrasives. Applied Surface Science, 255 (6), pp. 3764-3768, 2009, ISSN: 01694332, (cited By 36). (Type: Journal Article | Links | BibTeX) @article{Manivannan20093764, title = {The effect of hydrogen peroxide on polishing removal rate in CMP with various abrasives}, author = {R Manivannan and S Ramanathan}, url = {https://www.scopus.com/inward/record.uri?eid=2-s2.0-57849091385&doi=10.1016%2fj.apsusc.2008.10.040&partnerID=40&md5=c0304e76f482b1a09fa3f782d2c730fb}, doi = {10.1016/j.apsusc.2008.10.040}, issn = {01694332}, year = {2009}, date = {2009-01-01}, journal = {Applied Surface Science}, volume = {255}, number = {6}, pages = {3764-3768}, publisher = {Elsevier}, note = {cited By 36}, keywords = {}, pubstate = {published}, tppubtype = {article} } |
2008 |
Prasad, Y Nagendra; Kumar, V Vinod; Ramanathan, S: EIS studies of copper dissolution in arginine-peroxide slurries. 11 (12), 2008, ISSN: 19385862. (Type: Conference | Links | BibTeX) @conference{NagendraPrasad200833, title = {EIS studies of copper dissolution in arginine-peroxide slurries}, author = {Y Nagendra Prasad and V Vinod Kumar and S Ramanathan}, url = {https://www.scopus.com/inward/record.uri?eid=2-s2.0-55649122973&doi=10.1149%2f1.2888473&partnerID=40&md5=92326b096911a1c6732ba260b85e28be}, doi = {10.1149/1.2888473}, issn = {19385862}, year = {2008}, date = {2008-01-01}, journal = {ECS Transactions}, volume = {11}, number = {12}, pages = {33-41}, keywords = {}, pubstate = {published}, tppubtype = {conference} } |
Athilakshmi, J; Ramanathan, S; Chand, D K: Facile synthesis of palladium nanoclusters and their catalytic activity in Sonogashira coupling reactions. Tetrahedron Letters, 49 (36), pp. 5286-5288, 2008, ISSN: 00404039, (cited By 33). (Type: Journal Article | Links | BibTeX) @article{Athilakshmi20085286, title = {Facile synthesis of palladium nanoclusters and their catalytic activity in Sonogashira coupling reactions}, author = {J Athilakshmi and S Ramanathan and D K Chand}, url = {https://www.scopus.com/inward/record.uri?eid=2-s2.0-47549103690&doi=10.1016%2fj.tetlet.2008.06.089&partnerID=40&md5=cfa165b2550a8f640dbf373f636c1fc8}, doi = {10.1016/j.tetlet.2008.06.089}, issn = {00404039}, year = {2008}, date = {2008-01-01}, journal = {Tetrahedron Letters}, volume = {49}, number = {36}, pages = {5286-5288}, note = {cited By 33}, keywords = {}, pubstate = {published}, tppubtype = {article} } |