Department of Chemical Engineering

srinivar

Dr. Ramanathan S


 

Professor

MSB239

srinivar@iitm.ac.in

+91 44 22574171

Personal Website

Research Areas


Electrochemistry, chemical mechanical planarization for semiconductor processing


Publication

70 entries « 8 of 10 »

2010

Manivannan, R; Victoria, S N; Ramanathan, S: Mechanism of high selectivity in ceria based shallow trench isolation chemical mechanical polishing slurries. Thin Solid Films, 518 (20), pp. 5737-5740, 2010, ISSN: 00406090. (Type: Journal Article | Links | BibTeX)
Venkatesh, R P; Ramanathan, S: Electrochemical characterization of Cu dissolution and chemical mechanical polishing in ammonium hydroxide-hydrogen peroxide based slurries. Journal of Applied Electrochemistry, 40 (4), pp. 767-776, 2010, ISSN: 0021891X. (Type: Journal Article | Links | BibTeX)
Maddala, J; Sambath, K; Kumar, V; Ramanathan, S: Identification of reaction mechanism for anodic dissolution of metals using Electrochemical Impedance Spectroscopy. Journal of Electroanalytical Chemistry, 638 (2), pp. 183-188, 2010, ISSN: 15726657. (Type: Journal Article | Links | BibTeX)

2009

Prasad, Y Nagendra; Kumar, V Vinod; Ramanathan, S: Electrochemical impedance spectroscopic studies of copper dissolution in arginine-hydrogen peroxide solutions. Journal of Solid State Electrochemistry, 13 (9), pp. 1351-1359, 2009, ISSN: 14328488. (Type: Journal Article | Links | BibTeX)
Manivannan, R; Ramanathan, S: The effect of hydrogen peroxide on polishing removal rate in CMP with various abrasives. Applied Surface Science, 255 (6), pp. 3764-3768, 2009, ISSN: 01694332, (cited By 36). (Type: Journal Article | Links | BibTeX)

2008

Prasad, Y Nagendra; Kumar, V Vinod; Ramanathan, S: EIS studies of copper dissolution in arginine-peroxide slurries. 11 (12), 2008, ISSN: 19385862. (Type: Conference | Links | BibTeX)
Athilakshmi, J; Ramanathan, S; Chand, D K: Facile synthesis of palladium nanoclusters and their catalytic activity in Sonogashira coupling reactions. Tetrahedron Letters, 49 (36), pp. 5286-5288, 2008, ISSN: 00404039, (cited By 33). (Type: Journal Article | Links | BibTeX)
70 entries « 8 of 10 »