srinivar

@article{Manivannan20081748,
title = {Role of abrasives in high selectivity STI CMP slurries},
author = {R Manivannan and S Ramanathan},
url = {https://www.scopus.com/inward/record.uri?eid=2-s2.0-48949116077&doi=10.1016%2fj.mee.2008.04.031&partnerID=40&md5=9bcfbc3bffab2e75ff9e5b5f41655027},
doi = {10.1016/j.mee.2008.04.031},
issn = {01679317},
year = {2008},
date = {2008-01-01},
journal = {Microelectronic Engineering},
volume = {85},
number = {8},
pages = {1748-1753},
keywords = {},
pubstate = {published},
tppubtype = {article}
}

@article{Prasad20076353,
title = {Chemical mechanical planarization of copper in alkaline slurry with uric acid as inhibitor},
author = {Y N Prasad and S Ramanathan},
url = {https://www.scopus.com/inward/record.uri?eid=2-s2.0-34249284116&doi=10.1016%2fj.electacta.2007.04.044&partnerID=40&md5=170558e934dd0f9b7a6323b4c51cb126},
doi = {10.1016/j.electacta.2007.04.044},
issn = {00134686},
year = {2007},
date = {2007-01-01},
journal = {Electrochimica Acta},
volume = {52},
number = {22},
pages = {6353-6358},
note = {cited By 61},
keywords = {},
pubstate = {published},
tppubtype = {article}
}

@article{NagendraPrasad2006337,
title = {Role of amino-acid adsorption on silica and silicon nitride surfaces during STI CMP},
author = {Y Nagendra Prasad and S Ramanathan},
url = {https://www.scopus.com/inward/record.uri?eid=2-s2.0-33750472661&doi=10.1149%2f1.2351957&partnerID=40&md5=f47ebc02b680385489244a281bc485ff},
doi = {10.1149/1.2351957},
issn = {10990062},
year = {2006},
date = {2006-01-01},
journal = {Electrochemical and Solid-State Letters},
volume = {9},
number = {12},
pages = {337-339},
keywords = {},
pubstate = {published},
tppubtype = {article}
}

@article{Sekhar2006227,
title = {Characterization of copper chemical mechanical polishing (CMP) in nitric acid-hydrazine based slurry for microelectronic fabrication},
author = {M S Sekhar and S Ramanathan},
url = {https://www.scopus.com/inward/record.uri?eid=2-s2.0-33644896780&doi=10.1016%2fj.tsf.2005.09.128&partnerID=40&md5=86a998eda1ddca4b9cff31630b3330c2},
doi = {10.1016/j.tsf.2005.09.128},
issn = {00406090},
year = {2006},
date = {2006-01-01},
journal = {Thin Solid Films},
volume = {504},
number = {1-2},
pages = {227-230},
keywords = {},
pubstate = {published},
tppubtype = {article}
}

@article{NagendraPrasad2006337b,
title = {Role of amino-acid adsorption on silica and silicon nitride surfaces during STI CMP},
author = {Y Nagendra Prasad and S Ramanathan},
url = {https://www.scopus.com/inward/record.uri?eid=2-s2.0-33750472661&doi=10.1149%2f1.2351957&partnerID=40&md5=f47ebc02b680385489244a281bc485ff},
doi = {10.1149/1.2351957},
year = {2006},
date = {2006-01-01},
journal = {Electrochemical and Solid-State Letters},
volume = {9},
number = {12},
pages = {337-339},
keywords = {},
pubstate = {published},
tppubtype = {article}
}